Title:
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC THIN FILM
Document Type and Number:
Japanese Patent JP2003020226
Kind Code:
A
Abstract:
To prepare a piezoelectric thin film having ≥90% orientation in the (111) direction without giving thermal influences on the substrate or nearby electric circuits in an annealing process of the piezoelectric thin film.
The piezoelectric thin film contains lead zirconate titanate as the main composition prepared by depositing by a sol-gel method or sputtering. The piezoelectric thin film 15 is subjected to annealing by rapid heating and rapid cooling by irradiating and scanning the whole surface of the thin film 15 with pulse-generated laser light L in spots so as to accelerate crystallization with orientation. The film has ≥90% orientation in the (111) direction.
Inventors:
HONDA JUNICHI
TAMURA TAKASHI
TAKAHASHI KAZUO
FUJISAWA NORIKATSU
NIHEI YUKARI
TAMURA TAKASHI
TAKAHASHI KAZUO
FUJISAWA NORIKATSU
NIHEI YUKARI
Application Number:
JP2001205977A
Publication Date:
January 24, 2003
Filing Date:
July 06, 2001
Export Citation:
Assignee:
SONY CORP
International Classes:
C01G25/00; H01L41/18; H01L41/187; H01L41/39; H01L41/43; (IPC1-7): C01G25/00; H01L41/18; H01L41/187; H01L41/24
Attorney, Agent or Firm:
Kuninori Funabashi