To provide the long service life of an abrasive cloth, in a plane polishing method for polishing a work by pressing a flat plate shape work to the surface of the abrasive cloth fixed on the surface of a rotary polishing surface plate.

An abrasive is supplied to the surface of an abrasive cloth 3 fixed on a rotary polishing surface plate 2 and also the work 4 is polished by pressing a flat plate shape work 4 to the surface of the cloth 3. Meantime, in parallel with the polishing of the work 4, a raising head 7 having plural minute projections on a surface is contacted to the surface of the cloth 4 while supporting rotatably and slant-movably by a guide ring 8 and only the raising of a fibre on the surface of the cloth 4 is carried out substantially.