Title:
PLASMA GENERATOR
Document Type and Number:
Japanese Patent JP2010086958
Kind Code:
A
Abstract:
To provide an induction coupled plasma generator with thermal expansion of an insulator improved for insulating an electrode and the ground.
The plasma generator includes a chamber housing a substrate, a susceptor supporting the substrate and with a power source applied, a support base supported by the chamber to support the susceptor, and an insulator arranged between the susceptor and the support body to insulate the susceptor and the support body. Moreover, the insulator is formed by being separated into two or more.
Inventors:
KIM SU HONG
PARK MYOUNG SOO
CHO SUNG KEUN
SUNG DONG YONG
PARK MYOUNG SOO
CHO SUNG KEUN
SUNG DONG YONG
Application Number:
JP2009209604A
Publication Date:
April 15, 2010
Filing Date:
September 10, 2009
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
H05H1/46; C23C16/509
Domestic Patent References:
| JPH04324631A | 1992-11-13 | |||
| JP2006156530A | 2006-06-15 |
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Shinsuke Onuki
Tadashige Ito
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