Title:
PLATELIKE MATERIAL TRANSFER APPARATUS
Document Type and Number:
Japanese Patent JPH01171237
Kind Code:
A
Abstract:
PURPOSE:To prevent unversatility of performance of CVD films due to a fixed pitch of batch transfer, by varying a pitch between movable bases, namely a pitch between chucks as desired. CONSTITUTION:A motor 11 rotates a rotary threaded shaft 5 coupled thereto, whereby rotary threaded shafts 5 of respective movable bases 2 are rotated by rotation transmitting sections 6 each consisting of a spline shaft 6a and a boss 6b provided between the rotary threaded shafts 5. The movable bases 2 having nuts 8 engaged with respective screws 5a move along a guide 9 to change a pitch distance S between chucks 3. The pitch distance S can be varied by direction and a number of rotation in a range of S + or -alpha when alpha is a variable pitch width. The variable pitch width alpha may be determined as desired by changing a number of rotation. In this manner, platelike materials 4 can be transferred in batch between wafer receiving containers having different receiving pitches. Therefore, the wafers 4 can be transferred in a short time and efficiently.
Inventors:
SUZUKI MASAYUKI
Application Number:
JP33148487A
Publication Date:
July 06, 1989
Filing Date:
December 25, 1987
Export Citation:
Assignee:
KOKUSAI ELECTRIC CO LTD
International Classes:
B65H31/30; B65G1/00; B65G1/02; H01L21/677; H01L21/68; (IPC1-7): B65G1/02; B65H31/30; H01L21/68
Attorney, Agent or Firm:
Ishido
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