PURPOSE: To enable stable positioning by computing a volume inside a cylinder from a cylinder inner diameter, cylinder stroke and each measured value of pressure changes, varying a total effective sectional area of a plurality of solenoid valves according to the computed result, and thereby keeping pressure in the cylinder constant.
CONSTITUTION: In a magnetic rodless pneumatic cylinder 1, magnets are assembled in a piston and a cylinder movable part outside the cylinder. The cylinder movable part that is, a slider 3 is moved together with the movement of the piston through the magnetic connection of both magnets. The piston is moved and controlled by opening/closing a supplying solenoid valve 31 and a plurality of exhausting solenoid valves 32(32a to 32d) parallelly connected to each other, arranged in a solenoid valve box 29. A volume inside the cylinder chamber is computed based on each measured value of pneumatic pressures and a cylinder inner diameter. A total effective sectional area is varied by controlling the exhausting solenoid valves 32 having effective sectional areas proportional to the cylinder volume. Pressure in the cylinder is thus kept constant.
KIKU NOBUTAKA