Title:
研磨装置
Document Type and Number:
Japanese Patent JP5607227
Kind Code:
B2
Inventors:
Koike 今朝広
Application Number:
JP2013200974A
Publication Date:
October 15, 2014
Filing Date:
September 27, 2013
Export Citation:
Assignee:
Hoya Corp.
International Classes:
B24B37/00; B24B37/08; B24B37/20; B24B37/28
Attorney, Agent or Firm:
Toson Yasuo