To polish a workpiece and correct abrasive cloth simultaneously by arranging a ring member at the periphery of the fitting face of a polishing head, and fixing abrasive grains rigidly to the abrasive cloth side face of the ring member in a device for polishing the workpiece fixed to the fitting face of the polishing head while pressing the workpiece to the abrasive cloth.

A recessed part 25b is formed at the lower part periphery of a polishing head 25, and a ring member 51 is fittingly inserted in the recessed part 25b. When a workpiece 27 fixed to the fitting face 25a of the head 25 is pressed to abrasive cloth 23 provided on the upper face of a rotary table 21 while feeding abrasive material 47 from an abrasive material feed nozzle 49 in the rotating state of the rotary table 21 and head 25, abrasive grains 53 rigidly fixed to the abrasive cloth 23 side face of the ring member 51 are pressed to the abrasive cloth 23 so as to correct the abrasive cloth 23. In this state, the surface of the workpiece 27 is also polished and made into the flat mirror-like surface. The head 25 is put in a subordinate rotating state to the rotation of the table 21 to polish by cutting off a clutch 35.