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Title:
研磨用メディア、研磨用メディアの製造方法および研磨方法
Document Type and Number:
Japanese Patent JP5750974
Kind Code:
B2
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Inventors:
Hideki Ishigami
Hidefumi Nakamura
Junichi Hayashi
Application Number:
JP2011074394A
Publication Date:
July 22, 2015
Filing Date:
March 30, 2011
Export Citation:
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Assignee:
Seiko Epson Corporation
International Classes:
B24B31/14; B24B31/00; C09K3/14
Domestic Patent References:
JP1092060A
JP2003193036A
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa



 
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