Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POLISHING SYSTEM AND ITS METHOD
Document Type and Number:
Japanese Patent JPH1133905
Kind Code:
A
Abstract:

To provide a polishing system and its method which can mass-produce disks polished with great precision by incorporating polishing devices of a ring-shaped polishing member rotating type into an index unit.

In disk supply device 2, magnetic disks D are supplied to chucks 5, the chucks 5 holding the magnetic disks D are sequentially conveyed to a polishing device 3, a washing device 4, a polishing device 6 and disk discharge device 7, then polishing, washing, re-polishing and drawing of the magnetic disks D are performed by fixing five chucks 5 and five dressers 8 alternately around an index table 10 and rotating it by a pitch of 36°. At the same time, dressing of polishing pads of the polishing devices 3, 6 is performed by the dressers 8.


Inventors:
HARADA MASAO
Application Number:
JP21009097A
Publication Date:
February 09, 1999
Filing Date:
July 18, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/04; G11B5/84; (IPC1-7): B24B37/04; G11B5/84
Domestic Patent References:
JPS5899119A1983-06-13
JPS6227309A1987-02-05
JPS62292806A1987-12-19
Attorney, Agent or Firm:
Takakazu Tsukahara