Title:
POLYMER WITH NARROW DISPERSIBILITY HAVING ACID DISSOCIATING GROUP AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3703277
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain the subject polymer capable of satisfying many performances as a resist material by introducing acid dissociating group into hydrogenated product of a ring-opened metathesis (co)polymer, controlling the molecular weight and controlling the molecular weight distribution to narrow dispersibility.
SOLUTION: This polymer has a structural unit of formula I [R1 is a group capable of dissociating by an acid; R2 and R3 are each H, a 1-20C alkyl, halogen or the like; (m) and (n) are each an integer of 1-3] and has 1.0-2.0 ratio (Mw,/Mn) of weight average molecular weight Mw to number average molecular weight Mn and 500-100,000 Mn measured by GPC, expressed in terms of polystyrene. The polymer having a structure of formula I can be obtained by polymerizing a cyclic olefinic monomer of formula II by using a living ring-opening metathesis catalyst, hydrogenating the resultant polymer in the presence of a hydrogenation catalyst, hydrolyzing at least one part of the acid anhydride group and further reacting the polymer with vinyl ethers or α,β-unsaturated ketones.
Inventors:
Yoshihiro Yamamoto
Toshiro Takao
Fukuda Ritsuko
Keiichi Ikeda
Tadahiro Sunaga
Nobuo Kawahara
Ohkita Masui
Yasuo Ichiki
Toshiro Takao
Fukuda Ritsuko
Keiichi Ikeda
Tadahiro Sunaga
Nobuo Kawahara
Ohkita Masui
Yasuo Ichiki
Application Number:
JP34315597A
Publication Date:
October 05, 2005
Filing Date:
December 12, 1997
Export Citation:
Assignee:
Mitsui Chemicals, Inc.
International Classes:
G03F7/039; C08G61/08; (IPC1-7): C08G61/08; G03F7/039
Domestic Patent References:
| JP2001516804A | ||||
| JP11130843A |