Title:
POSITIONING DEVICE
Document Type and Number:
Japanese Patent JPH07335723
Kind Code:
A
Abstract:
PURPOSE: To position a substrate in a noncontact manner without generating friction between the substrate and a member, on which the substrate is loaded.
CONSTITUTION: The place of a substrate 2 is detected in a noncontact manner during carrying by using edge detecting means 17A, 17B, 17C, the quantity of the place of the substrate 2 displaced to a reference place to be positioned is obtained, a carrying means 12 is rotated by a first correction means 22A on the basis of the quantity of the substrate 2 displaced, and a statge 11 is moved in the X-Y direction by a second correction means 22B.
Inventors:
OTA TOSHIYA
YOSHIKAWA YUUKI
YOSHIKAWA YUUKI
Application Number:
JP15156694A
Publication Date:
December 22, 1995
Filing Date:
June 08, 1994
Export Citation:
Assignee:
NIKON CORP
International Classes:
B23Q15/22; B65G49/07; G05D3/12; H01L21/027; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G49/07; G05D3/12; H01L21/027
Attorney, Agent or Firm:
Kei Tanabe