Title:
POWDERY MATERIAL INJECTION AMOUNT CONTROL SYSTEM IN PROCESSING DEVICE
Document Type and Number:
Japanese Patent JPH05285838
Kind Code:
A
Abstract:
PURPOSE: To perform control such that a constant amount of a powder material is injected through an injection nozzle from a mixing chamber, in a processing device which performs etching processing or coating processing through injection of a particulate-form powder material through an injection nozzle.
CONSTITUTION: A decrease amount of a powdery material 18 in a mixing chamber 2 measured by means of an electric balance 26 is inputted to a control unit 27. A voltage value of a bimorph vibrator 21 is controlled by means of the control unit 27 to regulate an injection amount of a powder material injected through an injection nozzle 15.
Inventors:
MISHIMA AKIO
YOSHIKAWA TAKASHI
TSUCHIYA TAKASHI
YOSHIKAWA TAKASHI
TSUCHIYA TAKASHI
Application Number:
JP12003592A
Publication Date:
November 02, 1993
Filing Date:
April 14, 1992
Export Citation:
Assignee:
SONY CORP
International Classes:
B24C7/00; (IPC1-7): B24C7/00
Attorney, Agent or Firm:
Hidekuma Matsukuma
Previous Patent: JPS5285837
Next Patent: POWDER BEAM DISPERSING DEVICE, POWDER BEAM DISPERSION METHOD, AND POWDER BEAM PROCESSING DEVICE
Next Patent: POWDER BEAM DISPERSING DEVICE, POWDER BEAM DISPERSION METHOD, AND POWDER BEAM PROCESSING DEVICE