To provide a pressure-sensitive membrane sensor having a proper resistance value keeping a desired dynamic range, and to provide its manufacturing method.
In this pressure-sensitive membrane sensor having an approximately flat sensor cell 2 formed by arranging pressure-sensitive resistance layers 7b, 8b connected to a circuit wiring layer on insulating films 5, 6, a resistance value change is generated corresponding to a pressure transfer quantity by transferring an applied pressure in the cell surface from an initial transfer position toward the edge part of the cell, and adjusting layers 81A-81H for resistance value adjustment are provided on a part of the surfaces of the pressure-sensitive resistance layers 7b, 8b, and the sensor cell 2 has a cell pattern constituting sensing domains 8X-8X6 on a pressure-sensitive layer part exposed from the adjusting layers, and each sensing domain has a pattern shape approximately along the pressure transfer direction.
ISHII TAKAHIRO
Iwa Saki Kokuni
Kawamata Sumio
Shunichi Takahashi