Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH05164640
Kind Code:
A
Abstract:
PURPOSE:To ensure the highly sensitive performance of a pressure sensor by equalizing the capacities of fluid-pressure introducing paths into two film-shaped piezoelectric elements, removing the inconvenience in measurement of a flow rate when a fluid to be measures is not flowing, and equalizing the pressure propagating speeds to the upper and rear surfaces of each piezoelectric element. CONSTITUTION:In a pressure sensor 1, two piezoelectric elements 2 and 3, wherein electrode layers are provided on both surfaces of each film-shaped piezoelectric body, are arranged so that the surfaces in the same direction form the same polarization. Fluid pressure is introduced through inlet nozzles 39 and 40 on the first surface of one piezoelectric element and the second surface of the other piezoelectric element and the first surface of the other piezoelectric element and the second surface of one piezoelectric element, respectively. Means 51 and 52, which can adjust the capacities of the paths, are provided for at least one of fluid-pressure introducing paths 42, 43, 44 and 45.
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Inventors:
KATO TOMIO
YAMAMOTO MASAKAZU
ITO TORU
YAMAMOTO MASAKAZU
ITO TORU
Application Number:
JP34973091A
Publication Date:
June 29, 1993
Filing Date:
December 10, 1991
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
G01F1/32; G01L9/08; G01L19/00; G01F1/20; (IPC1-7): G01F1/20; G01F1/32; G01L9/08; G01L19/00
Attorney, Agent or Firm:
Ban Toshimitsu