Title:
PREVENTING METHOD FOR STRIPPING OF ALUMITE OF MAGNETIC DISC SUBSTRATE
Document Type and Number:
Japanese Patent JPS5816067
Kind Code:
A
Abstract:
PURPOSE: To prevent stripping of an alumite layer of a magnetic disc substrate from Al base in the stage of forming a magnetic film on an alumite substrate by sputtering by heating the alumite substrate at specific temp.
CONSTITUTION: In the case of forming a magnetic film of γ-Fe2O3, etc. on an alumite substrate by sputtering to about 0.2μm thickness, the alumite substrate is beforehand heated for about 1hr at 150W350°C, after which it is slowly cooled at 100°C/hr cooling rate. By such heat treatment, the strains between the alumite layer and the Al are relieved, and the stripping of the aluminte layer from the underlying Al at the temp. in the stage of forming the magnetic film by sputtering is prevented.
Inventors:
SHINOHARA MASAKI
WAKAMATSU HIROAKI
NAKAGAWA KATSUHIKO
ISHII OSAMU
WAKAMATSU HIROAKI
NAKAGAWA KATSUHIKO
ISHII OSAMU
Application Number:
JP11228881A
Publication Date:
January 29, 1983
Filing Date:
July 20, 1981
Export Citation:
Assignee:
FUJITSU LTD
NIPPON TELEGRAPH & TELEPHONE
NIPPON TELEGRAPH & TELEPHONE
International Classes:
C25D11/18; C23C14/02; C25D11/20; C25D11/24; G11B5/85; (IPC1-7): C23C15/00; C25D11/18; G11B5/84
Attorney, Agent or Firm:
Aoki Akira
Previous Patent: ハンドルスイッチの取り付け構造
Next Patent: TARGET ELECTRODE STRUCTURE FOR PLANER MAGNETRON SYSTEM SPATTERING DEVICE
Next Patent: TARGET ELECTRODE STRUCTURE FOR PLANER MAGNETRON SYSTEM SPATTERING DEVICE