Title:
PROBE APPARATUS
Document Type and Number:
Japanese Patent JPH0541418
Kind Code:
A
Abstract:
PURPOSE: To obtain a probe apparatus capable of test measurement of electric characteristics of a substrate to be measured in an ordinary atmosphere, and of remarkable reduction of attaching probability of dust to undesirable part positions.
CONSTITUTION: By rotating a fan 27 for gathering air, the outside air is taken in as shown by arrows in figure, from air feeding inlets 26, and cleaned with a filter 28. The cleaned air passes through holes 21, 35, 36, a mesh type ceiling plate 31, etc., flows through each of the parts in a cabinet 1, and is discharged outside from an exhaust vent 29.
Inventors:
ABE YUICHI
Application Number:
JP19424791A
Publication Date:
February 19, 1993
Filing Date:
August 02, 1991
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F24F7/06; H01L21/66; (IPC1-7): F24F7/06; H01L21/66
Attorney, Agent or Firm:
Saichi Suyama (1 person outside)
Next Patent: ESTIMATION METHOD OF TEST EQUIPMENT