Title:
PROBE CARD
Document Type and Number:
Japanese Patent JP3609353
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To use a common substrate, even when the number of the layers is different in the case probe needles are standing for multiple layers.
SOLUTION: The probe card comprises a substrate 10 forming a wiring layer therein, a plurality of probe needles 16 aligned in 3 layers or more, a plurality of connection lands 18 to which the base ends of the probe needles 16 are electrically connected, and a plurality of tester lands 12 to which the connection lands 18 are electrically connected via the wiring layer. The alignment of the connection lands has features. A plurality of connection lands are aligned linearly to compose land rows, which are aligned in a plurality of rows in parallel with respect to each other. When the maximum number of needle standing layers is M, the number of connection lands to be aligned to one land row is 2M. The difference in the land number of the corresponding connection land of adjacent land rows is (M+1). Hereby, when standing needles to M layers or lower, the common substrate (common connection land alignment) can be used, even when standing needles to any number of layers.
Inventors:
Nobuyuki Tokawa
Application Number:
JP2001168646A
Publication Date:
January 12, 2005
Filing Date:
June 04, 2001
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
International Classes:
G01R1/073; G01R31/00; H01L21/66; G01R31/26; (IPC1-7): G01R1/073; G01R31/00; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Toshiyuki Suzuki