PROBE POSITION CONTROL MECHANISM OF SCANNING TUNNELING MICROSCOPE

Title:

PROBE POSITION CONTROL MECHANISM OF SCANNING TUNNELING MICROSCOPE

Document Type and Number:

Japanese Patent JP2005049187

Kind Code:

A

Abstract:

To provide a small and inexpensive probe position control mechanism of a scanning tunneling microscope capable of observing directly a sample.

The probe position control mechanism 2 of the scanning tunneling microscope has a substrate 5, a probe attaching portion 10 attached to the substrate 5 and holding a probe 11, and holding legs 25 not less than three attached to the substrate 5 and holding the substrate 5 and the probe attaching portion 10. The holding legs 25 are provided with finely regulating screws with small pitch on their peripheries respectively. The holding legs 25 are rotatably inserted in screw nuts attached to the substrate 5 and provided with the finely regulating screws with the small pitch. Stepping motors 21 are connected to holding leg portions not less than three respectively, and the holding legs 25 are rotated by the stepping motors 21 respectively.

Inventors:

UCHIDA HIROHISA
INOUE MITSUTERU
KIN KISHUN

Application Number:

JP2003280674A

Publication Date:

February 24, 2005

Filing Date:

July 28, 2003

Export Citation:

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Assignee:

KIN KISHUN
UCHIDA HIROHISA

International Classes:

G01B7/34; G01B11/00; G01Q10/02; G01Q10/04; G01Q60/10; G01Q60/16; (IPC1-7): G01N13/10; G01B7/34; G01B11/00; G01N13/12

Attorney, Agent or Firm:

Motomu Itou
Takahiko Kasuya

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