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Patent Searching and Data


Title:
PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2012019127
Kind Code:
A
Abstract:

To provide a processing method for reducing the thickness of a workpiece, while also flattening it with high accuracy.

A processing method for flattening, by grinding, a workpiece bonded on a substrate 23 comprises: a substrate holding step for holding the substrate by a chuck table 50 of a grinder; a substrate flattening step for flattening the substrate held by the chuck table by grinding it with grinding means 10; a bonding step for bonding the workpiece onto the flattened substrate; a workpiece holding step for holding, after carrying out the bonding step, the substrate side of the workpiece by the same chuck table used in the substrate flattening step; and a workpiece grinding step for grinding to flatten the workpiece, which is held by the chuck table in the workpiece holding step, with the same grinding means used in the substrate flattening step.


Inventors:
SEKIYA KAZUMA
Application Number:
JP2010156556A
Publication Date:
January 26, 2012
Filing Date:
July 09, 2010
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/304; B24B7/22; B24B41/06
Domestic Patent References:
JP2010042469A2010-02-25
JP2009043931A2009-02-26
JP2005303214A2005-10-27
JP2005333100A2005-12-02
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito