To provide a method for easily producing irregular structure on a rear surface of a thin film photoelectric conversion device.

A rear surface reflection part 5 is formed by a substrate which is separated from a photoelectric conversion unit, and a thin film photoelectric conversion device is formed by laminating the rear surface reflection part 5 on the photoelectric conversion unit by a transparent adhesion layer 6. Thus, the production of the rear surface reflection part is not affected by the photoelectric conversion unit. Therefore, ideal irregularities are produced with fewer limitations of a method for creating irregularities.