PRODUCTION OF DIETHYLAMINOTRIMETHYLSILANE

Title:

PRODUCTION OF DIETHYLAMINOTRIMETHYLSILANE

Document Type and Number:

Japanese Patent JPH04173794

Kind Code:

A

Abstract:

PURPOSE: To obtain the subject compound useful as an electronic material such as primer for photoresist and obtain by-products in an efficiently utilizable state by reacting diethylamine with N,O-bis(trimethylsilyl)acetamide.

CONSTITUTION: The objective compound is produced by reacting diethylamine with an N,O-bis(trimethylsilyl)acetamide of formula (X is H or F) preferably at an equivalent ratio of 1:(1.1-1.4) at 20-60°C, optionally in the presence of a solvent such as benzene or THF. N-trimethylsilylacetamide or N- trimethylsilyltrifluoroacetamide produced as by-product can easily be converted to and reused as N,O-bis(trimethylsilyl)acetamide or N,O-bis(trimethylsilyl) trifluoroacetamide.

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Inventors:

SHINOHARA NORIO
KUDO MUNEO
MATSUMURA KAZUYUKI
SUZUKI NOBUYUKI

Application Number:

JP30290890A

Publication Date:

June 22, 1992

Filing Date:

November 07, 1990

Export Citation:

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Assignee:

SHINETSU CHEMICAL CO

International Classes:

C07F7/10; (IPC1-7): C07F7/10

Attorney, Agent or Firm:

Kiyoaki Takita

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