Title:
PRODUCTION METHOD FOR CARBON NANOTUBE
Document Type and Number:
Japanese Patent JP3524542
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method capable of growing, on a substrate, a carbon nanotube uniform in characteristics and directionality at a relatively low temperature without needing a refining treatment.
SOLUTION: This method comprises: forming in advance a region for starting the growth of the carbon nanotube on the surface of the substrate; introducing the material gas including a raw material for carbon introduction, into a reaction vessel in which the above region is arranged; and further generating plasma by an AC glow discharge to form the carbon nanotube on the substrate; or disposing, on the substrate, the fine holes in which the growth nuclei are arranged on their bottoms and by which the growth direction of carbon nanotube is regulated; and growing the nanotube from the growth nuclei on the bottoms of fine holes thereinto.
Inventors:
Den, Toru
Application Number:
JP2002245762A
Publication Date:
May 10, 2004
Filing Date:
June 18, 1997
Export Citation:
Assignee:
CANON INC
International Classes:
C01B31/02; D01F9/127; H01J9/02; (IPC1-7): C01B31/02; D01F9/127
Other References:
ＴＡＫＡＳＨＩ ＫＹＯＴＡＮＩ ｅｔ ａｌ，Ｆｏｒｍａｔｉｏｎ ｏｆ ｕｌｔｒａｆｉｎｅ ｃａｒｂｏｎ ｔｕｂｅｓ ｂｙ ｕｓｉｎｇ ａｎ ａｎｏｄｉｃ ａｌｕｍｉｎｕｍ ｏｘｉｄｅ ｆｉｌｍ ａｓ ａ ｔｅｍｐｌａｔｅ，ＣＨＥＭＩＳＴＲＹ ＯＦ ＭＡＴＥＲＩＡＬＳ，１９９５年，Ｖｏｌ．７， Ｎｏ．８，ｐ．１４２７−１４２８
Ｗ．Ｚ．ＬＩ ｅｔ ａｌ，Ｌａｒｇｅ−ｓｃａｌｅ ｓｙｎｔｈｅｓｉｓ ｏｆ ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ，ＳＣＩＥＮＣＥ，１９９６年，Ｖｏｌ．２７４，ｐ．１７０１−１７０３
Ｗ．Ｚ．ＬＩ ｅｔ ａｌ，Ｌａｒｇｅ−ｓｃａｌｅ ｓｙｎｔｈｅｓｉｓ ｏｆ ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ，ＳＣＩＥＮＣＥ，１９９６年，Ｖｏｌ．２７４，ｐ．１７０１−１７０３
Attorney, Agent or Firm:
宮崎 昭夫 （外３名）
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