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Title:
PRODUCTION METHOD FOR POLYMER COMPOUND AND RESIST MATERIAL PREPARED BY USING THE POLYMER COMPOUND
Document Type and Number:
Japanese Patent JP2002234910
Kind Code:
A
Abstract:

To provide a polymer compound which, used as a base resin, gives a resist material having high dissolution contrast, high resolution, and exposure allowance.

This polymer compound, having repeating units represented by formula (2), is produced by deblocking a polymer compound having repeating units represented by formula (1) (wherein R2 and R3 are each an alkyl; R5 is H, OH, an alkyl, an optionally substituted alkoxy, a halogen or an acid- unstable group; R1 and R4 are each H or CH3; R6 and R7 are each H, CH3, an alkoxycarbonyl, CN or a halogen; R8 is a tert-alkyl; n is 0-4; p is a positive number; and q and r are each 0 or a positive number provided they are not simultaneously 0) in the presence of an acid catalyst.


Inventors:
TAKEDA TAKANOBU
WATANABE OSAMU
Application Number:
JP2001369729A
Publication Date:
August 23, 2002
Filing Date:
December 04, 2001
Export Citation:
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Assignee:
SHINETSU CHEMICAL CO
International Classes:
G03F7/039; C08F8/14; C08F212/14; C08F220/18; H01L21/027; (IPC1-7): C08F8/14; C08F212/14; C08F220/18; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Takashi Kojima (1 person outside)