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Title:
PRODUCTION OF OXIDE SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JP2507910
Kind Code:
B2
Abstract:

PURPOSE: To improve the quality by growing an oxide single crystal by melting and solidifying method while impressing magnetic field to an oxide molten liquid and generating spiral convection excellent in central symmetry in the molten liquid.
CONSTITUTION: A sintered compact is formed by CIP molding the oxide of TiO2 or the like and firing at a prescribed temp. Next, a raw material oxide is filled in a crucible made of platinum or the like and is melted by high frequency induction heating. Then the spiral convection excellent in central symmetry is generated in the molten liquid by impressing magnetic field of 0.1-10 stera to the oxide molten liquid. The high quality oxide single crystal large in diameter, lengthy and large sized and excellent in composition uniformity is obtained through Czochralski method by growing the crystal by dipping a seed crystal into the molten liquid and withdrawing the crystal while adjusting revolution speed and revolution direction.


Inventors:
MYAZAWA YASUTO
KIMURA SHIGEYUKI
MORITA SHOJI
SEKIWA HIDEYUKI
Application Number:
JP8810693A
Publication Date:
June 19, 1996
Filing Date:
March 23, 1993
Export Citation:
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Assignee:
KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
International Classes:
C30B11/00; C30B13/30; C30B15/22; C30B29/16; C30B30/04; H01L21/208; (IPC1-7): C30B15/22; C30B11/00; C30B13/30; C30B29/16; C30B30/04; H01L21/208
Domestic Patent References:
JP5841795A
JP3141187A
JP6479099A
JP63215587A
JP6036392A