Title:
PRODUCTION OF THIN MAGNETIC MATERIAL FILM
Document Type and Number:
Japanese Patent JPS61287032
Kind Code:
A
Abstract:
PURPOSE: To obtain a thin hexagonal ferrite film having small coercive force at a low temp. of ≤350°C and large satd. magnetic flux density by using a plasma CVD method.
CONSTITUTION: Bubblers 16W19 contg. diethoxy iron, diethoxy barium, diethoxy cobalt and diethoxy zinc are heated. Gaseous argon 20 for bubbling is passed to these bubblers and the vapors thereof are introduced onto a polyimide substrate heated to 345°C in a reaction chamber 11 in which a reduced pressure state is maintained by a rotary pump 22. Oxygen 21 which is likewise the reactive gas is then passed on the polyimide substrate. High-frequency electric power is impressed to cause reaction so that hexagonal ferrite is deposited on the polyimide substrate.
Inventors:
AOKI MASAKI
TORII HIDEO
OKINAKA HIDEYUKI
SAKAI MASAYUKI
TORII HIDEO
OKINAKA HIDEYUKI
SAKAI MASAYUKI
Application Number:
JP12740685A
Publication Date:
December 17, 1986
Filing Date:
June 12, 1985
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G11B5/66; C08L79/08; C23C16/40; G11B5/64; G11B5/706; G11B5/73; G11B5/85; G11B5/851; H01F41/22; (IPC1-7): G11B5/66; G11B5/706; G11B5/85
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
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