Title:
PYROELECTRIC INFRARED RADIATION DETECTING ELEMENT AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3334377
Kind Code:
B2
Abstract:
PURPOSE: To provide a pyroelectric infrared radiation detecting element of which the heat capacity is small, heat responsiveness is excellent, costs are low, downsizing and integration can be performed, productivity is excellent, and reliability is high, with regard to the pyroelectric infrared radiation detecting element using a pyroelectric body for detecting the infrared radiation.
CONSTITUTION: On a surface 100 of an MgO monocrystal substrate, a pyroelectric body 13 directed about 45° to a direction of a surface 010 is formed, and via two or more etching holes arranged similarly on the 45° line form a cavity 15. Since an etching speed has selectivity, a pyramid-shape cavity is formed and the pyroelectric body 13 is efficiently placed thereon.
Inventors:
Tokumi Kotani
Kazushi Morisugi
Koji Nomura
Kazushi Morisugi
Koji Nomura
Application Number:
JP28197094A
Publication Date:
October 15, 2002
Filing Date:
November 16, 1994
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01J1/02; G01J5/02; G01J5/34; (IPC1-7): G01J5/02; G01J1/02
Domestic Patent References:
| JP7318420A | ||||
| JP63243817A | ||||
| JP5416699A |
Other References:
Ｊｐｎ．Ｊ．Ａｐｐｌ．Ｐｈｙｓ．，日本，Ｖｏｌ３２，Ｎｏ．１２Ｂ，ｐ．６２９７−６３００
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)
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