To provide a pyroelectric infrared sensor which is suited to downsizing without shielding plate and driving motor for chopper, and is excellent in workability and productivity because of integrated production.
This infrared sensor is provided with a semiconductor substrate 1 made of conductive n-type silicon, a substrate insulation layer 10 laminated thereon, a spacer layer 9 formed on the specified part around the substrate insulation layer 10, an insulation layer 3 fixed on the spacer layer 9, an operating part 4 which is formed by notching the insulation layer 3 and whose both ends are connected to the insulation layer 3, a clearance part 2 formed between the operating part 4 and substrate insulation layer 10, a first electrode part 5 formed on the upper surface of the operating part 4, an infrared ray detection element 6 formed on the upper surface of the first electrode 5, a second electrode 7 formed on the infrared ray detection element 6, and a third electrode 8 laminated on the rear surface of the semiconductor substrate 1.
IHARA KEITA
NAKAJIMA KOJI
OMORI TAKAHIRO
