石英ガラス製ルツボの製造方法および製造装置

Title:

石英ガラス製ルツボの製造方法および製造装置

Document Type and Number:

Japanese Patent JP3601939

Kind Code:

B2

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Inventors:

Hiroto Ikuno
Tatsuya Rouki
Tomoyuki Ishii
Yasuo Ishikawa

Application Number:

JP15826097A

Publication Date:

December 15, 2004

Filing Date:

June 16, 1997

Export Citation:

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Assignee:

Toshiba Ceramics Co., Ltd.

International Classes:

C03B20/00; B01L3/04; C03B8/04; C03B19/14; C30B15/10; C30B29/06; F27B14/04; (IPC1-7): C03B8/04; B01L3/04; C03B20/00; C30B15/10; C30B29/06; F27B14/04

Domestic Patent References:

JP1148718A
JP55126542A
JP6043277B2

Attorney, Agent or Firm:

Saichi Suyama

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