Title:
QUASI-PLANAR TYPE JOSEPHSON JUNCTION ELEMENT
Document Type and Number:
Japanese Patent JPH02192774
Kind Code:
A
Abstract:
PURPOSE:To obtain an excellent Josephson element by using oxide high temperature superconductor by a method wherein a superconducting thin film of almost uniform thickness is formed on the surface of a substrate, on which a step- difference is formed, so as to interpose the step-difference and to be positioned on both sides thereof, and both of the film surfaces are joined by a bridge of superconductor. CONSTITUTION:On the surface of an MgO substrate 1, a step-difference is formed. High temperature superconducting films 2, 3 made of YBCO are formed on the surface of the upper step side and the lower step side, respectively, so as to interpose the step part 1a. The surfaces of the thin films 2, 3 are joined by a bridge 4 made of YBCO. This manufacturing method is as follows. Resist is spread uniformly on a substrate; one side half thereof is eliminated by photolithography; Ar ion milling is performed by using the left resist as a mask, thereby manufacturing the substrate 1; a YBCO thin film is uniformly sputtered on the substrate; thereon negative resist is spread uniformly, and eliminated by exposure and development so as to leave the bridge 4 part; by using the remaining resist film as a mask, the YBCO thin film is etched, thereby obtaining the bridge 4 coming into contact with the thin films 2, 3.
More Like This:
Inventors:
KITA JUNICHI
YAMADA YASUHARU
YAMADA YASUHARU
Application Number:
JP1218589A
Publication Date:
July 30, 1990
Filing Date:
January 21, 1989
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
H01L39/22; (IPC1-7): H01L39/22
Domestic Patent References:
| JPS62248272A | 1987-10-29 | |||
| JPS63306675A | 1988-12-14 |
Attorney, Agent or Firm:
Nishida Arata