Title:
原料タンクの監視装置及び原料タンクの監視方法
Document Type and Number:
Japanese Patent JP7154116
Kind Code:
B2
Abstract:
A monitoring apparatus for monitoring a raw material tank monitors the temperature of the raw material tank when the temperature of the raw material tank storing a solid or liquid raw material is raised to a set temperature by a heating unit. The monitoring apparatus includes: a temperature determination unit configured to determine whether the temperature has reached a stable range including the set temperature, and determine whether the temperature has deviated from the stable range; and a setting unit configured to set the set temperature of the heating unit to 0° C. when a predetermined timeout time has elapsed from a time point at which the temperature determination unit determined that the temperature deviated from the stable range.
Inventors:
Kenta Horigo
Shinobu Kawamorita
Yousuke Matsumoto
Kousuke Takahashi
Naohide Ito
Shinobu Kawamorita
Yousuke Matsumoto
Kousuke Takahashi
Naohide Ito
Application Number:
JP2018222448A
Publication Date:
October 17, 2022
Filing Date:
November 28, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/448
Domestic Patent References:
| JP2004349439A | ||||
| JP2001077033A | ||||
| JP8339881A | ||||
| JP2005258630A | ||||
| JP6266410A | ||||
| JP2014007289A | ||||
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| JP2014178071A | ||||
| JP10125447A | ||||
| JP2018078271A | ||||
| JP63021836A | ||||
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| JP2007258630A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito