Title:
ROTARY HOLDER AND METHOD
Document Type and Number:
Japanese Patent JP3292639
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a rotary holder of a substance to be treated which can maintain excellently a horizontal degree while the substance to be treated is floated and rotated, and which can restrict displacement in a horizontal direction of the substance to be treated rotation.
SOLUTION: A rotatable rotary body 102 in which a chuck face 103 for holding a substance W is formed at an end part is provided. A gas remaining groove 105 is provided near an outer margin 104 of the chuck face 103. A gas jet 108 is provided concentrically with the gas remaining groove 105 on the chuck face 103 more inside than an inner margin 107 of this gas remaining groove 105. A gas supply passage 109 having a branch passage 110 which communicates with the gas jet 108 inside the rotary body 102, and which is inclined for the chuck face 103 is formed.
More Like This:
| WO/2018/163935 | WAFER SUPPORT BASE |
| JP3944136 | EDGE-HOLDING ALIGNER |
| JP2022048064 | HOLDING DEVICE |
Inventors:
Nobuya Nobuhito
Nishigaki Hisashi
Company Ura Hajime
Nishigaki Hisashi
Company Ura Hajime
Application Number:
JP26533295A
Publication Date:
June 17, 2002
Filing Date:
October 13, 1995
Export Citation:
Assignee:
Toshiba Microelectronics Corporation
Toshiba Corporation
Toshiba Corporation
International Classes:
H01L21/683; B65G49/07; H01L21/304; H01L21/306; H01L21/68; (IPC1-7): H01L21/68; B65G49/07
Domestic Patent References:
| JP77070A | ||||
| JP637003A | ||||
| JP2253637A | ||||
| JP62196342U | ||||
| JP6343428U | ||||
| JP6240853B1 |
Attorney, Agent or Firm:
Kazuo Sato (3 others)