Title:
RU TARGET MATERIAL FOR MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM
Document Type and Number:
Japanese Patent JP2002133653
Kind Code:
A
Abstract:
To prevent the coarsening of crystal grain diameter, lowering of breaking resistibility and the increase of the generation of foreign matters and the deterioration with time that have been occurred in an conventional method even though a high purity RU target material can be obtained in the conventional method.
An ideal RU target material is obtained as a magnetic recording medium through decreasing significantly the generation of foreign matters and the deterioration with time at sputtering time that depends on the crystal grain diameter of the target material and in addition, maintaining the strength by making the average crystal grain diameter 100 μm or smaller.
Inventors:
UENO TOMONORI
KAN TAKESHI
CHIWATA NOBUHIKO
TANIGUCHI SHIGERU
UENO SUGURU
KAN TAKESHI
CHIWATA NOBUHIKO
TANIGUCHI SHIGERU
UENO SUGURU
Application Number:
JP2000324559A
Publication Date:
May 10, 2002
Filing Date:
October 24, 2000
Export Citation:
Assignee:
HITACHI METALS LTD
International Classes:
C23C14/34; G11B5/64; G11B5/851; (IPC1-7): G11B5/851; C23C14/34; G11B5/64