PURPOSE: To improve the availability of a scan type electron microscope by providing function for automatically setting a position on a wafer to be observed at the center of an observing visual field on the basis of information from electric operation inspecting data.
CONSTITUTION: In a semiconductor memory, memory cells are regularly aligned in a matrix state, and any malfunction of these cells can be measured by a probe tester while maintaining in a wafer state. when an improper bit is detected, a position on the wafer of a pellet and a position of the improper bit are transferred to a sample base moving amount calculating information memory 4, a sample base moving amount calculator 3 transmits calculated result to a sample base driver 2 on the basis of the information to move a sample base 104, thereby setting the improper bit to the center of a visual field.
AKASHI KICHIZO
KOBAYASHI TAKASHI
KANZAKI TSUNEO
HITACHI MICROCUMPUTER ENG
Next Patent: SAMPLE CONVEYING APPARATUS