Title:
SCANNING PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP3450460
Kind Code:
B2
Abstract:
PURPOSE: To obtain a scanning probe microscope in which the vibration amplitude of a cantilever is scanned while it is kept constant, by which the uneven image of a sample is detected and which finds the distance dependence of a tunnel current or of evanescent waves without being influenced by the local viscoelastic coefficient of the sample.
CONSTITUTION: By an excitation part, a probe 1 on a cantilever 2 is vibrated in the normal-line direction of a sample 3. The vibration amplitude of the cantilever 2 which is changed by an interaction (an atomic force, an electrostatic force and a magnetic force) acting between the sample 3 and the probe 1 is kept constant. Thereby, while the three-dimensional unevenness of the sample 3 is being detected, the probe 1 traces the surface of the sample 3, and the uneven image of the sample is obtained. At the same time, the distance dependence of a tunnel current or of evanescent waves is found without being influenced by the local viscoelastic coefficient of the sample 3 coming into contact with the tip part of the probe 1.
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Inventors:
Akira Yagi
Application Number:
JP23572394A
Publication Date:
September 22, 2003
Filing Date:
September 29, 1994
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G01B21/30; G01N37/00; G01Q60/06; G01Q60/24; G01Q60/32; G01Q90/00; H01J37/28; (IPC1-7): G01N13/16
Domestic Patent References:
| JP4184201A | ||||
| JP7198732A | ||||
| JP5223520A | ||||
| JP4225104A | ||||
| JP5332711A | ||||
| JP5187864A | ||||
| JP312503A | ||||
| JP650750A | ||||
| JP6221846A | ||||
| JP6259820A | ||||
| JP6137856A | ||||
| JP6117846A |
Attorney, Agent or Firm:
Takehiko Suzue
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