Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP5912958
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas-type acceleration sensor capable of detecting an acceleration in a plurality of directions.SOLUTION: A semiconductor device includes: a gas-type acceleration sensor; and a semiconductor package equipped with the gas-type acceleration sensor. The gas-type acceleration sensor includes: a first heater; a first temperature sensor; and a second temperature sensor. The first temperature sensor and second temperature sensor are arranged to face each other across the first heater. A direction of connection between the first temperature sensor and second temperature sensor is oblique to a bottom surface of the semiconductor package.
Inventors:
Akira Tanabe
Yasutaka Nakashiba
Yasutaka Nakashiba
Application Number:
JP2012161455A
Publication Date:
April 27, 2016
Filing Date:
July 20, 2012
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
G01P15/08; G01P15/02; G01P15/18
Domestic Patent References:
| JP200839519A | ||||
| JP2005351892A | ||||
| JP63236967A |
Foreign References:
| US6182509 |
Attorney, Agent or Firm:
Minoru Kudo