Title:
半導体装置およびその製造方法
Document Type and Number:
Japanese Patent JP4984398
Kind Code:
B2
Inventors:
Yoshio Sugi
Naoto Fujishima
Shinichiro Matsunaga
Mutsumi Kitamura
Naoto Fujishima
Shinichiro Matsunaga
Mutsumi Kitamura
Application Number:
JP2005029787A
Publication Date:
July 25, 2012
Filing Date:
February 04, 2005
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/336; H01L29/06
Domestic Patent References:
| JP8181313A | ||||
| JP6097450A | ||||
| JP2003204064A | ||||
| JP2003031804A | ||||
| JP2003142684A |
Attorney, Agent or Firm:
Akinori Sakai