Title:
SEMICONDUCTOR INTEGRATED CIRCUIT MEASURING EQUIPMENT
Document Type and Number:
Japanese Patent JP2968628
Kind Code:
B2
Abstract:
PURPOSE: To facilitate the self-cleaning of a contactor, to reduce the number of solder chip eliminating processes, and to increase the quality of the products and the measuring efficiency by setting the size of a pusher for pushing an IC into the contactor properly and by controlling the stroke.
CONSTITUTION: For measurement of an IC 4, the IC 4 is pushed into a contact block 2 by a pusher 5 for bringing IC leads into electric contact with a contactor 3. At that time, the width of the pusher 5 is made a little larger than the distance to the contactor 3. By this, the pusher 5 is pushed to a cleaning stroke several times. The movement of the pusher 5 needs a two-staged stroke mechanism, a stroke for IC contact and a stroke for cleaning. Then, the timing of the movement is controlled. By this method, an automatic self- cleaning of the contactor is available.
Inventors:
ARIMA TOSHIRO
Application Number:
JP30429891A
Publication Date:
October 25, 1999
Filing Date:
November 20, 1991
Export Citation:
Assignee:
KYUSHU NIPPON DENKI KK
International Classes:
H01L21/66; G01R31/26; (IPC1-7): H01L21/66; G01R31/26
Domestic Patent References:
| JP4164265A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)