PURPOSE: To ensure a sufficient capacitor capacity even when an element is made fine by a method wherein the surface on the side of an insulating film in a part formed in a contact hole of the lower-part electrode of a capacitor is formed to be a deep recessed shape.

CONSTITUTION: At a lower-part electrode 16 constituting a capacitor, the surface shape of a part formed in a contact hole 14 is formed to be a deep recessed shape. The surface shape can be formed easily by using a sputtering method. Thereby, the surface area of the capacitor lower-part electrode can be increased by the same plane area as compared with a capacitor lower-part electrode in which the contact hole 14 has been filled. Consequently, even when an element is made fine, it is possible to ensure a sufficient capacitor capacity which is required from a viewpoint of reliability.