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Patent Searching and Data


Title:
SHEETLIKE MATERIAL CONVEYOR
Document Type and Number:
Japanese Patent JP2010129565
Kind Code:
A
Abstract:

To provide a conveyor which solves a problem caused by a resist liquid scattering to a sheetlike material when applied.

The conveyor includes a plurality of needle-shaped supports 12 for mounting the sheetlike material 11 and a base part 13 for fixing its base. The base part 13 includes a triangular pyramidal support receiver 14. The needle-shaped supports 12 are provided to stand straight at appropriate intervals in appropriate arrangement so that their sharp edges approximately make a line. The support receiver 14 is made of resin such as polytetrafluoroethylene to which an applied material to the sheetlike material 11 is hard to attach. Thus, the applied material (resist for example) is easily wiped, even if the material scatters. An evacuation port 16 for extracting the applied material not applied to the sheetlike material 11 but dropping on the support receiver 14 to the outside is provided at a corner of a disklike receiving base 15 of the base part 13. The applied material such as the resist is hard to attach and re-attach to the needle-formed support 12, to its sharp edge in particular, so that good conveyance conditions are materialized.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
SATO HIROO
Application Number:
JP2008299147A
Publication Date:
June 10, 2010
Filing Date:
November 25, 2008
Export Citation:
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Assignee:
ADTEX KK
International Classes:
H01L21/673; H01L21/683
Attorney, Agent or Firm:
Naoki Yoshimura