SILICON BALL MANUFACTURING METHOD AND DEVICE

Title:

SILICON BALL MANUFACTURING METHOD AND DEVICE

Document Type and Number:

Japanese Patent JP3865944

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To manufacture silicon balls of high purity at a low cost.
SOLUTION: Silicon material W of die shape is accommodated in a pocket 4 of a jig 3 and barrel-machined into spherical shape by rotating a rotating surface table 2 with abrasive grain. The silicon material W is cut out of a silicon wafer of plate shape. As the surface table, a belt surface table can also be used instead of the rotating surface table 2.

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WO/2022/041355

ENVIRONMENTALLY-FRIENDLY FINISHING MACHINING METHOD FOR SILICON NITRIDE CERAMIC BALLS

Inventors:

Toshiaki Kaneko
Muramatsu victory

Application Number:

JP20793898A

Publication Date:

January 10, 2007

Filing Date:

July 23, 1998

Export Citation:

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Assignee:

ntn corporation

International Classes:

B24B11/02; B24B31/00; B24B37/02; H01L21/02; H01L21/304; (IPC1-7): B24B11/02; B24B37/02; H01L21/02; H01L21/304

Domestic Patent References:

JP1232987A
JP47000478B1
JP7314308A
JP2190251A
JP2232154A
JP61168467A
JP59105470A
JP49068389A

Attorney, Agent or Firm:

Masashi Noda
Shuji Sugimoto

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