Title:
SLIDING MEMBER FOR VACUUM
Document Type and Number:
Japanese Patent JP2008063606
Kind Code:
A
Abstract:
To provide a sliding member having low friction and high durability in vacuum, in atmosphere or in the both condition to be used in the space and a vacuum system.
The surface of diamond or a diamond film being the first sliding member is ground so that its surface roughness is 0.5 m in the arithmetic average roughness Ra. On the outermost surface of the second sliding member being an opponent member to be slid, an alloy or plating containing, by weight, 4 to 96% Ni, or an alloy or plating comprising 5 to 65% Ni and 15 to 55% Cr is formed. Thus the sliding member for vacuum is formed of the first and second sliding members.
Inventors:
MOTO AKIO
GOTO KENICHI
KANDA KAZUTAKA
TAKANO SHIGETO
GOTO KENICHI
KANDA KAZUTAKA
TAKANO SHIGETO
Application Number:
JP2006241027A
Publication Date:
March 21, 2008
Filing Date:
September 06, 2006
Export Citation:
Assignee:
NACHI FUJIKOSHI CORP
International Classes:
C23C16/27; B32B15/04; F16C33/06; F16C33/24
Domestic Patent References:
| JP2002070507A | 2002-03-08 |
Attorney, Agent or Firm:
Junji Kawachi