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Title:
SOLID-STATE IMAGE SENSING DEVICE
Document Type and Number:
Japanese Patent JPH01280354
Kind Code:
A
Abstract:

PURPOSE: To prevent the light incident on an insulating film on a photodiode from being scattered to other regions adjacent to the photodiode while the light is transmitted through the insulating film and to suppress a smear and a deterioration in the sensitivity by forming a transfer electrode in a groove part which has been dug in a semiconductor substrate.

CONSTITUTION: Transfer electrodes 4-1, 4-2 are formed in a groove part which has been dug in a semiconductor substrate 1 in a solid-state image sensing device having the following: a photodiode part 8 arranged on the semiconductor substrate 1 and used to accumulate a signal charge generated by the incident light; a readout part 2 arranged to be adjacent to the photodiode part 8 and used to read out the signal charge accumulated in the photodiode part 8 after receiving the signal charge and transferring it by means of the transfer electrodes 4-1, 4-2; a picture-element separation region 3 to which the transfer electrodes 4-1, 4-2 of the readout part 2 are wired and which separates the photodiode part 8. For example, a grid-shaped groove is formed in a readout part 2 and a picture-element separation region 3 on a P-type semiconductor substrate 1 composed of silicon; transfer electrodes 4-1, 4-2 of the readout part 2 and the picture-element separation region 3 are filled completely into the groove.


Inventors:
FUJII KOICHI
Application Number:
JP11098788A
Publication Date:
November 10, 1989
Filing Date:
May 06, 1988
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01L27/14; H01L27/148; H04N5/335; H04N5/359; H04N5/365; H04N5/369; H04N5/3728; (IPC1-7): H01L27/14; H04N5/335
Domestic Patent References:
JPS59172764A1984-09-29
JPS61263155A1986-11-21
JPS6369264A1988-03-29
JPS6086975A1985-05-16
Attorney, Agent or Firm:
Naoki Kyomoto (3 outside)