PURPOSE: To perform spattering of a large base plate continuously by supporting plural base plates for evaporation in a spattering device, and letting them pass in front of a flat evaporating source plural times.

CONSTITUTION: A rotation shaft 10 provided on a bottom plate 12 of a vacuum container is rotated by a motor 13 in the vacuum container, and plural base plate fixing stands 5 mounted on supporting arms 8 are rotated. Base plates 6 to be treated by spattering are attached to the base plate fixing stands 5, and they are rotated continuously by rollers 2 together with fixing stands 5 along the periphery of a fixed cam plate 3. The base plates successively circulate and pass in front of a flat plate type evaporation source 1 being kept parallel to the evaporation source 1 and spattering is performed on the base plates 6 from the evaporation source 1. Thus, continuous spattering of large base plates is made possible.