To provide a spraying device for forming an oxide thin film that is in an inexpensive configuration, and can manufacture a high-quality multilayer film in which the film thickness and composition of each layer are controlled accurately, and to provide a method for manufacturing the oxide multilayer film.
The spraying device has a plurality of systems of raw material supply sections 10, having a raw material storage section 11, a pump 12, and a flowmeter 13, and supplies a raw material from the raw material supply section of each system to a common raw material supply port 19 that is a spraying section, or supplies a raw material from the raw material supply section 10 of each system to an individual raw material supply port 10 that is a spraying section prepared for each system.
SHIBATA KENJI
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