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Patent Searching and Data


Title:
SPRAYING DEVICE FOR FORMING OXIDE THIN FILM, AND METHOD FOR MANUFACTURING OXIDE MULTILAYER FILM
Document Type and Number:
Japanese Patent JP2005217217
Kind Code:
A
Abstract:

To provide a spraying device for forming an oxide thin film that is in an inexpensive configuration, and can manufacture a high-quality multilayer film in which the film thickness and composition of each layer are controlled accurately, and to provide a method for manufacturing the oxide multilayer film.

The spraying device has a plurality of systems of raw material supply sections 10, having a raw material storage section 11, a pump 12, and a flowmeter 13, and supplies a raw material from the raw material supply section of each system to a common raw material supply port 19 that is a spraying section, or supplies a raw material from the raw material supply section 10 of each system to an individual raw material supply port 10 that is a spraying section prepared for each system.


Inventors:
YAMADA AYANO
SHIBATA KENJI
Application Number:
JP2004022510A
Publication Date:
August 11, 2005
Filing Date:
January 30, 2004
Export Citation:
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Assignee:
HITACHI CABLE
International Classes:
B05B12/14; H01L21/31; (IPC1-7): H01L21/31; B05B12/14