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Title:
STABILIZED VAPOR DEPOSITING MATERIAL USING TITANIUM OXIDE AS BASE
Document Type and Number:
Japanese Patent JPH09241830
Kind Code:
A
Abstract:

To improve the structure of a sintering and vapor depositing material by incorporating specified oxide into a vapor depositing material by specified weight%.

In a stabilized sintering and vapor depositing material using titanium oxide as the base, titanium oxide has a compsn. of TiOx, and (x)=1.4 to 1.8. This vapor depositing material contains oxides from the groups of zirconium oxide (ZrO2), hafnium oxide (HfO2), yttrium oxide (Y2O3) and ytterbium oxide (Y2O3) by 0.1 to 10wt.% as stabilizing additives in a uniformly dispersed state. Preferably, these oxides are present in the vapor depositing material by 0.5 to 5wt.%, more preferably, by about 2.5wt.%. In this way, the problem that fine parts are largely formed in sintering and varpor depositing stages can be solved.


Inventors:
KAARUUFURIIDORIHI KUREHE
Application Number:
JP4591697A
Publication Date:
September 16, 1997
Filing Date:
February 28, 1997
Export Citation:
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Assignee:
MERCK PATENT GMBH
International Classes:
C03C17/245; C04B35/46; C23C14/08; C23C14/24; C01G23/04; (IPC1-7): C23C14/24; C01G23/04; C03C17/245
Attorney, Agent or Firm:
Wakabayashi Tadashi