Title:
STROBE ELECTRON BEAM DEVICE
Document Type and Number:
Japanese Patent JPS6010636
Kind Code:
A
Abstract:
PURPOSE:To enable to observe the internal voltage waveform of a sample even if the time stability of a clock pulse is insufficient except an accurate delay unit by providing an arbitrary clock pulse in a repetition period of the observing time origin. CONSTITUTION:An electron optical barrel 1 emits an electron beam to the observing point of a sample 3 placed in a sample chamber 2. The production of an electron beam is controlled by a pulse driver 6. A pulse generator 7 responses to signals on lines 8-11. The counted output of a counter 20 is connected to one input of a comparator 21, and the set output of a register 22 is connected to the other input. The output of the comparator 21 is connected to a variable delay unit 23. A control counter 14 outputs a clock pulse number designation signal and a time designation signal. The output of the secondary electron detector 13 is connected through a signal processor 16 for addition-averaging it to the counter 14. An electron beam emitting timing pulse is supplied through a line 17 from the generator 7.
Inventors:
GOTOU YOSHIAKI
OZAKI KAZUYUKI
ISHIZUKA TOSHIHIRO
ITOU AKIO
FURUKAWA YASUO
OZAKI KAZUYUKI
ISHIZUKA TOSHIHIRO
ITOU AKIO
FURUKAWA YASUO
Application Number:
JP11904783A
Publication Date:
January 19, 1985
Filing Date:
June 30, 1983
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G01R31/302; H01L21/66; H01J37/26; (IPC1-7): H01L21/66; H01J37/26
Attorney, Agent or Firm:
Koshiro Matsuoka