To provide a substrate conveyance method and a substrate conveyance system for loading a substrate for start or restart on a hand member of a substrate conveyance robot without allowing a person to enter a storage space.

These substrate conveyance method and substrate conveyance system comprise a process for moving the hand member for loading a substrate of the substrate conveyance robot 1 into a substrate loading space 5 positioned outside of the storage space 3 storing the substrate conveyance robot 1, a process for loading the substrate for start or restart on the hand member moved to the outside of the storage space 3, a process for recognizing a position for storing a substrate and storing it in a controller for controlling the substrate conveyance robot 1 in a substrate handling device 4 for handling a cassette 2 for storing the substrate and the substrate by driving the substrate conveyance robot 1 while the substrate is loaded, and a process for driving and controlling so as to carry the substrates provided in the cassette 2 and the substrate handling device 4 in and out based on the recognized position.