Title:
基板保持具及び走査型電子顕微鏡装置
Document Type and Number:
Japanese Patent JP6994437
Kind Code:
B2
Abstract:
To mount a substrate while making the direction of circuit pattern the same, even for multiple types of substrates where the formation positions of V notch are different from each other, without changing the fixing pin of a substrate holding tool.SOLUTION: Since a reciprocal movement mechanism 51 of a notch engagement fixing pin 40an for standard wafer and a notch engagement fixing pin 40as for special wafer is provided, the notch engagement fixing pin 40as for special wafer or the notch engagement fixing pin 40an for standard wafer never interfere with a standard V notch wafer 2n or a special V notch wafer, before the notch engagement fixing pin 40an for standard wafer or the notch engagement fixing pin 40as for special wafer engages with the V notch of the standard V notch wafer 2n or the V notch of the special V notch wafer, and thereby both standard V notch wafer 2n and special V notch wafer can be mounted on the holder.SELECTED DRAWING: Figure 2
Inventors:
Yuki Kayama
Application Number:
JP2018128974A
Publication Date:
January 14, 2022
Filing Date:
July 06, 2018
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01L21/68; H01J37/16; H01J37/18; H01J37/20; H01J37/28; H01L21/66; H01L21/683
Domestic Patent References:
| JP2000294618A | ||||
| JP9097583A | ||||
| JP2002042708A | ||||
| JP2007227192A | ||||
| JP2008311351A |
Attorney, Agent or Firm:
Hiraki International Patent Office
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