Title:
SUBSTRATE TRANSPORTATION DEVICE ACCOMPANYING A PLURALITY OF INDEPENDENT MOVABLE ARMS
Document Type and Number:
Japanese Patent JP2015053509
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a robot manipulator which reduces complexity of a robot system, which improves reliability and cleanliness and which accompanies an independently movable arm.SOLUTION: A substrate transportation device includes: a drive part accompanying a drive motor; two joint arms 491L, 491R which are operably connected to a common drive shaft of the drive motor for expansion and contraction of each join arm and in which the common drive shaft has one independent rotation center shaft and each joint arm transports end effectors 430L, 430R while holding a substrate; and a coupling system having a lost motion system in which both joint arms are operably coupled to the drive motor.
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Inventors:
MARTIN HOSEK
GILCHRIST ULYSSES
GILCHRIST ULYSSES
Application Number:
JP2014224566A
Publication Date:
March 19, 2015
Filing Date:
November 04, 2014
Export Citation:
Assignee:
BROOKS AUTOMATION INC
International Classes:
H01L21/677; B25J9/06; B65G49/06; B65G49/07
Domestic Patent References:
| JP2005229087A | 2005-08-25 | |||
| JPH07227777A | 1995-08-29 | |||
| JP2006013371A | 2006-01-12 | |||
| JP2002361577A | 2002-12-18 | |||
| JP2006120659A | 2006-05-11 |
Attorney, Agent or Firm:
Toson Motohiko