Title:
SUCK BACK VALVE
Document Type and Number:
Japanese Patent JP3951150
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve response accuracy of a diaphragm and to accurately control a flow of a pressured fluid which is sucked, by controlling a suck back mechanism which sucks the fluid in a flow path with negative pressure action of a flexible member with a flow controlling means which has an electrostriction/piezoelectric member.
SOLUTION: When an on/off valve 26 is turned on with a pressured fluid which is fed to a cylinder chamber 48 through a flow controlling means 115a, a coating liquid flows along a flow path 38 and is dripped onto a semi- conductive wafer. After a prescribed amount of the coating liquid is coated, the on/off valve 26 is turned off, a diaphragm 80 of a such back mechanism 28 is raised to generate negative pressure action, and the liquid is prevented from dripping onto the semi-conductive wafer. The flow controlling means 115a is formed by placing an electrostriction element 137 through an insulating member in a hole of an upper side casing. Thus, pilot pressure can be controlled electrically and accurately, and response accuracy is improved.
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Inventors:
Katsuhiko Odashima
Kenichi Kurosawa
Kenichi Kurosawa
Application Number:
JP9106897A
Publication Date:
August 01, 2007
Filing Date:
April 09, 1997
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K31/365; F16K23/00; G05D16/20; (IPC1-7): F16K31/365
Domestic Patent References:
| JP7052902A | ||||
| JP6346983A | ||||
| JP60227078A | ||||
| JP7210254A | ||||
| JP8219305A |
Attorney, Agent or Firm:
Takehiro Chiba
Tatsuhiko Sato
Tatsuhiko Sato